RNU - 장비/개발

장비/개발 > 신뢰성시험장비 > ???? ? ????

3???? ..

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XRF(X-..

XRD(X-..

	장비명	: ???? ?????(FEG-SEM)
	제작회사	: JEOL
	모델명	: JSM-6390
	사용용도	: ????? ???? ??? ??

개요

Field Emission ??? ?? ???, ???? ??????? ?? ?? ? ??? ?? ?? ??? ??

규 격

- Secondary electron image resolution
- 1.5nm at 15kV or better, - 5.0nm at 1kV or better
- Magnification : 20 to 500,000x or wider
- Accelerating voltage : 0.5 - 30kV or wider
- Gun source : Should be Cold Field Emission gun
- Energy Dispersive X-ray Spectrometer(EDAX?? Phoenix 60)

활용분야

- ??? ???? ??
- Particle size ??
- Surface and particulate morphology ??